Wafer Bright-Field and Dark-Field Inspection Objective
Equipment Accuracy:
Detailed Introduction:This Wafer Bright-Field & Dark-Field Objective is an infinity-corrected plan compound objective designed exclusively for semiconductor wafer defect inspection. A single unit integrates dual bright-field and dark-field optical paths. It is compatible with metallographic microscopes, semiconductor inspection microscopes and wafer AOI systems, and deployed for defect detection on 6/8/12-inch bare wafers, post-lithography wafers and diced chips. It is a core optical component for semiconductor front-end manufacturing and packaging quality control.
