Wafer Bright-Field & Dark-Field Inspection Objective
Equipment Accuracy:
Detailed Introduction:The wafer bright and dark field objective is an infinity-corrected plan compound objective specially used for semiconductor wafer defect inspection. It integrates integrated bright-field and dark-field dual optical paths in one single objective. Compatible with metallurgical microscopes, semiconductor inspection microscopes and wafer AOI equipment, it detects defects on 6/8/12-inch bare wafers, post-lithography wafers and diced chips. It is a core optical component for semiconductor front-end processes and packaging quality inspection.
